METAX GmbH (en) > Rotary joints > Rotary joint for vacuum > Rotary drive for plasma process 2

Rotary drive for plasma process 2

Rotary drive for plasma process 2

Rotary drive for plasma process 2

General operating data

Medium: vacuum, process gas
Temperature: < 100° C
Rotational speed: 20 min-1
Pressure: up to 10-5 mbar

You can find the values in psi, ° F and FPM on the data sheet.

Special features

  • 4 pole power transmission of middle frequency into the turning substrate carrier
  • Integrated rotary drive by chain drive