METAX GmbH (en) > Rotary joints > Rotary joint for vacuum > Rotary drive for plasma process 3

Rotary drive for plasma process 3

Rotary drive for plasma process 3

Rotary drive for plasma process 3

General operating data

Medium: vacuum, process gas
Temperature: 200° C
Rotational speed: < 10 min-1
Pressure: up to 10-5 mbar

You can find the values in psi, ° F and FPM on the data sheet.

Special features

  • Transport role for linear substrate movement driven by gear belt