METAX GmbH (en) > Rotary joints > Rotary joint for vacuum > Rotary drive for plasma process

Rotary drive for plasma process

Rotary drive for plasma process

Rotary drive for plasma process

General operating data

Medium: vacuum, process gas
Temperature: 200° C
Rotational speed: < 50 min-1
Pressure: up to 10-5 mbar

You can find the values in psi, ° F and FPM on the data sheet.

Special features

  • Coaxial power transmission of high frequency 13,56 MHz into the turning substrate carrier
  • Vacuum sealing with cooling
  • Integrated rotary drive by gear belt including position recognition