Rotary drive for plasma process
Rotary drive for plasma process
General operating data
| Medium: | vacuum, process gas |
| Temperature: | 200° C |
| Rotational speed: | < 50 min-1 |
| Pressure: | up to 10-5 mbar |
You can find the values in psi, ° F and FPM on the data sheet.
Special features
- Coaxial power transmission of high frequency 13,56 MHz into the turning substrate carrier
- Vacuum sealing with cooling
- Integrated rotary drive by gear belt including position recognition
